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PubMed · 15943460

Nanometer patterning with ice.

Gavin M King·Gregor Schürmann·Daniel Branton·Jene A Golovchenko
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Abstract

Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.

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ChromiumElectronsIceMicroscopy, Atomic ForceMicroscopy, Electron, ScanningNanostructuresNanotechnologySiliconSurface PropertiesTemperatureWaterJournal ArticleResearch Support, N.I.H., ExtramuralResearch Support, Non-U.S. Gov'tResearch Support, U.S. Gov't, Non-P.H.S.Research Support, U.S. Gov't, P.H.S.

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Gavin M King, Gregor Schürmann, Daniel Branton, Jene A Golovchenko. 2005. Nanometer patterning with ice.. https://doi.org/10.1021/nl050405n

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