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PubMed · 11543549

Fourier-transform optical microsystems.

S D Collins·R L Smith·C Gonzalez·K P Stewart·J G Hagopian·J M Sirota
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Abstract

The design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm x 5 cm x 10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a relatively high spectral resolution, 0.1 cm-1, with adequate optical throughput.

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Equipment DesignHeliumInterferometryLasersMiniaturizationNeonOptics and PhotonicsSpectroscopy, Fourier Transform InfraredNASA Discipline Environmental HealthNon-NASA CenterJournal ArticleResearch Support, Non-U.S. Gov'tResearch Support, U.S. Gov't, Non-P.H.S.

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S D Collins, R L Smith, C Gonzalez, K P Stewart, J G Hagopian, J M Sirota. 1999-06-15. Fourier-transform optical microsystems.. https://doi.org/10.1364/ol.24.000844

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