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Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems.

We propose to use a Nomarski imaging interferometer to measure the out- of-plane displacement field of micro-electro-mechanical systems. It is shown that the measured optical phase arises from both height and slope gradients. By using four integrating buckets, a more efficient approach to unwrap the measured phase is presented, thus making the method well suited for highly curved objects. Slope and height effects are then decoupled by expanding the displacement field on a functions basis, and the inverse transformation is applied to get a displacement field from a measured optical phase map change with a mechanical loading. A measurement reproducibility of approximately 10 pm is achieved, and typical results are shown on a microcantilever under thermal actuation, thereby proving the ability of such a setup to provide a reliable full-field kinematic measurement without surface modification.

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Vibration-compensated interferometry system using phase-modulating interference fringe subdivision technology.

An innovative vibration-compensation method, with phase-modulating interference fringe subdivision technology, is described. It simulates fringe movement by the phase difference of signals and can detect the fringe movement with an accuracy of 1/400 fringe spacing using this subdivision technology. A closed-loop vibration-compensation system is built, and the measurement of an interference fringe movement and a vibration-compensation test are successfully demonstrated. Because of this new method and a new feedback algorithm that was introduced, interference fringes can be stabilized at any preset phase position in real time. Compared with known methods, this method is simple and inexpensive, as well as effective.

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Corneal thickness measured by interferometry.

An optical method for measuring the thickness of transparent structures has been developed, and has been used to measure, in vivo, the thickness of the human cornea. The thickness is measured by placing the anterior surface of the cornea at the focus of a beam of coherent laser light and then measuring the spacing between the interference fringes generated by the reflected light. The thickness is then calculated from the fringe spacing. The method has been used to measure corneal thickness in frog and human corneas. These measurements have been correlated with histologic and pachometer measurements of corneal thickness. A significant capability of this technique is to measure the thickness of optically opaque corneas.

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Low-coherence interferometry in random media. I. Theory.

We present a new nonperturbative theoretical method for the analytical description of light propagation in random multiscattering media. The method is illustrated through the calculation of an expression that describes optical backscattering from a semi-infinite disordered medium. A companion paper [J. Opt. Soc. Am. A 17, 2034 (2000)] compares the theoretical expression with experimental data.

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Phase-shift calibration algorithm for phase-shifting interferometry.

We propose a novel phase-shift calibration algorithm. With this technique we determine the unknown phase shift between two interferograms by examining the sums and differences of the intensities on each interferogram at the same spatial location, i.e., I1(x, y) +/- I2(x, y). These intensities are normalized so that they become sinusoidal in form. A uniformly illuminated region of the interferograms that contains at least a 2pi variation in phase is examined. The extrema of these sums and differences are found in this region and are used to find the unknown phase shift. An error analysis of the algorithm is provided. In addition, an error-correction algorithm is implemented. The method is tested by numerical simulation and implemented experimentally. The numerical tests, including digitization error, indicate that the phase step has a root-mean-square (RMS) phase error of less than 10(-6) deg. Even in the presence of added intensity noise (5% amplitude) the RMS error does not exceed 1 deg. The accuracy of the technique is not sensitive to nonlinearity in the interferogram.

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Fiber optic interferometry: statistics of visibility and closure phase.

Interferometric observations with three telescopes or more provide two observables: closure phase information and visibility measurements. When single-mode interferometers are used, both observables have to be redefined in the light of the coupling phenomenon between the incoming wave front and the fiber. We introduce the estimator of both the so-called modal visibility and the modal closure phase. Then we compute the statistics of the two observables in the presence of partial correction by adaptive optics, paying attention to the correlation between the measurements. We find that the correlation coefficients are mostly zero and in any case are never greater than 1/2 for the visibilities and 1/3 for the closure phases. From this theoretical analysis, a data-reduction process using classic least-squares minimization is investigated. In the framework of the AMBER instrument, the three-beam recombiner of the Very Large Telescope Interferometer (VLTI), we simulate the observation of a single Gaussian source and study the performances of the interferometer in terms of diameter measurements. We show that the observation is optimized, i.e., that the signal-to-noise ratio (SNR) of the diameter is maximal when the FWHM of the source is roughly 1/2 of the mean resolution of the interferometer. We finally point out that, in the case of an observation with three telescopes, neglecting the correlation between the measurements leads to overestimating the SNR by a factor of square root of 2. We infer that in any case this value is an upper limit.

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Generalized phase-shifting interferometry by use of a direct stochastic algorithm for global search.

A new phase-shifting interferometric technique that uses an unknown phase step is described in which the phase step is determined by use of an algorithm called Probabilistic Global Search Lausanne (PGSL). One of the main sources of error in phase stepping is piezoelectric device (PZT) nonlinearity. The PGSL algorithm identifies the characteristics of the response of the PZT to the applied voltage through matching predicted and measured responses. The unknown phase step is also calculated with 0.097% error. This approach overcomes the limitations of existing techniques to determine unknown phase steps. Linear regression is subsequently applied for interference phase determination.

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Algorithm for near-field reconstruction based on radial-shearing interferometry.

A new iterative algorithm to be used to precisely reconstruct near-field distribution from an interferogram of a laser output generated by a cyclic radial-shearing interferometer is proposed. First, by use of a window function around the zero-frequency part of the Fourier transform of the interferogram and calculation of the inverse Fourier transform of the zero-frequency part, we obtain the background intensity distribution of the interferogram. Then, according to the iterative algorithm, the near-field distribution of the laser output is precisely reconstructed from the background intensity distribution obtained in the first step. A numerical simulation and an actual experiment of the near-field reconstruction of the laser output with arbitrary amplitude distribution are implemented successfully.

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Reconstruction method for weak-phase optical interferometry.

Current optical interferometers are affected by unknown turbulent phases on each telescope. We account for this lack of phase information by introducing system aberration parameters, and we solve the image reconstruction problem by minimizing an original joint criterion in the aberrations and in the object. We validate this method by means of simulations. Tests on experimental data are under way.

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Single-optical-element soft-x-ray interferometry with a laser-plasma x-ray source.

We report on a compact interferometer for the water-window soft-x-ray range that is suitable for operation with laser-plasma sources. The interferometer consists of a single diffractive optical element that focuses impinging x rays to two focal spots. The light from these two secondary sources forms the interference pattern. The interferometer was operated with a liquid-nitrogen jet laser-plasma source at lambda=2.88 nm. Scalar wave-field propagation was used to simulate the interference pattern, showing good correspondence between theoretical and experimental results. The diffractive optical element can simultaneously be used as an imaging optic, and we demonstrate soft-x-ray microscopy with interferometric contrast enhancement of a phase object.

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Adaptive gain interferometry: a new mechanism for optical metrology with speckle beams.

We describe, for the first time to our knowledge, the use of a saturable laser gain medium to implement an adaptive gain interferometer for performing optical metrology with speckle-distorted beams. We show that interferometric formation and replay of a saturable gain hologram permit coherent extraction of fast vibrational information about an object in real time and removal of slowly varying spatial distortion. An experimental characterization of the frequency response of the adaptive gain interferometer is made by use of a diode-pumped solid-state laser amplifier, and a new theoretical formulation of the gain interferometer is also developed for the first reported time.

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Correcting movement errors in frequency-sweeping interferometry.

Absolute distance measurements can be performed with an interferometric method that uses only a single tunable laser. This method has one major drawback, because a small target movement of the order of one wavelength during a measurement will be interpreted as a movement of one synthetic wavelength. This effect is usually mitigated by adding a second (nonscanning) laser. We show that absolute distance measurements can be performed with only one laser if the movements encountered are smooth, on the time scale of one measurement. In this case the movement errors can be compensated with a simple algorithm that combines several subsequent measurements. First experimental results show good agreement with theory.

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Resolution-enhanced Fourier transform method for the estimation of multiple phases in interferometry.

A phase shifting method based on high-resolution frequency estimation and Fourier transform technique is introduced. This method, also referred to as the eigenvector method, draws on the complementary strengths of both these methods. The salient feature of the method lies in its ability to handle nonsinusoidal wave-forms, multiple piezoelectric transducers, and arbitrary phase steps in an optical configuration. The method does not need the addition of carrier fringes to separate the spectral contents in the intensity fringes. The proposed concept thus overcomes the limitations of methods based on Fourier transform techniques. The robustness of the proposed method is studied in the presence of noise.

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Heterodyne spectral interferometry for multidimensional nonlinear spectroscopy of individual quantum systems.

A novel implementation of transient nonlinear spectroscopy is presented that allows the study of the transient nonlinear polarization emitted from individual electronic transitions. Both the amplitude and the phase of the polarization are retrieved, permitting the implementation of multidimensional spectroscopy in the excitation pulse delays. The technique is shown to detect mutual coherent coupling in a group of individual, localized excitonic transitions.

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Chirp estimation in phase-shifting interferometry.

We propose a new approach for estimating the phase in the presence of a nonlinear response of a phase-shifting device: a piezoelectric transducer (PZT). The method is complemented well by the high resolution and the maximum likelihood estimation techniques in the estimation of the phase step and the nonlinear coefficient. The advantage of the proposed method is that it can be extended to the extraction of multiple phases in configurations involving multiple PZTs in the presence of nonlinearity. Symmetricity in the phase steps is not required in this method. Hence hysteresis of the PZT does not have any influence on the accuracy of the phase estimation. The effectiveness of the method is shown by experimental results.

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