Computer-controlled optical scanning tile microscope.

Abstract

A new type of computer-controlled optical scanning, high-magnification imaging system with a large field of view is described that overcomes the commonly believed incompatibility of achieving both high magnification and a large field of view. The new system incorporates galvanometer scanners, a CCD camera, and a high-brightness LED source for the fast acquisition of a large number of a high-resolution segmented tile images with a magnification of 800x for each tile. The captured segmented tile images are combined to create an effective enlarged view of a target totaling 1.6 mm x 1.2 mm in area. The speed and sensitivity of the system make it suitable for high-resolution imaging and monitoring of a small segmented area of 320 microm x 240 microm with 4 microm resolution. Each tile segment of the target can be zoomed up without loss of the high resolution. This new microscope imaging system gives both high magnification and a large field of view. This microscope can be utilized in medicine, biology, semiconductor inspection, device analysis, and quality control.