@misc{indiciaef86d18592ef9,
  title = {Sematech: purpose and performance.},
  author = {D A Irwin and P J Klenow},
  year = {1996},
  doi = {10.1073/pnas.93.23.12739},
  url = {https://pubmed.ncbi.nlm.nih.gov/8917487/},
  note = {Source identifier: 8917487}
}