@misc{indiciae4bb7fdad3e08,
  title = {Balanced detector interferometric ellipsometer.},
  author = {Chien Chou and Hui-Kang Teng and Chien-Chung Tsai and Li-Ping Yu},
  year = {2006},
  doi = {10.1364/josaa.23.002871},
  url = {https://pubmed.ncbi.nlm.nih.gov/17047715/},
  note = {Source identifier: 17047715}
}