TY  - RPRT
TI  - Absorbance-modulation optical lithography.
AU  - Rajesh Menon
AU  - Henry I Smith
PY  - 2006
DO  - 10.1364/josaa.23.002290
UR  - https://pubmed.ncbi.nlm.nih.gov/16912755/
ID  - 16912755
ER  -