@misc{indiciaeb150f96ea806,
  title = {Absorbance-modulation optical lithography.},
  author = {Rajesh Menon and Henry I Smith},
  year = {2006},
  doi = {10.1364/josaa.23.002290},
  url = {https://pubmed.ncbi.nlm.nih.gov/16912755/},
  note = {Source identifier: 16912755}
}