TY  - RPRT
TI  - Enhancing semiconductor device performance using ordered dopant arrays.
AU  - Takahiro Shinada
AU  - Shintaro Okamoto
AU  - Takahiro Kobayashi
AU  - Iwao Ohdomari
PY  - 2005
DO  - 10.1038/nature04086
UR  - https://pubmed.ncbi.nlm.nih.gov/16237438/
ID  - 16237438
ER  -