@misc{indiciae007fc26139ba,
  title = {Enhancing semiconductor device performance using ordered dopant arrays.},
  author = {Takahiro Shinada and Shintaro Okamoto and Takahiro Kobayashi and Iwao Ohdomari},
  year = {2005},
  doi = {10.1038/nature04086},
  url = {https://pubmed.ncbi.nlm.nih.gov/16237438/},
  note = {Source identifier: 16237438}
}