TY  - RPRT
TI  - Dry etching and sputtering.
AU  - C D W Wilkinson
AU  - M Rahman
PY  - 2004
DO  - 10.1098/rsta.2003.1307
UR  - https://pubmed.ncbi.nlm.nih.gov/15306280/
ID  - 15306280
ER  -