@misc{indiciae63991bf81ea0,
  title = {Dry etching and sputtering.},
  author = {C D W Wilkinson and M Rahman},
  year = {2004},
  doi = {10.1098/rsta.2003.1307},
  url = {https://pubmed.ncbi.nlm.nih.gov/15306280/},
  note = {Source identifier: 15306280}
}