@misc{indiciae2ff3b14f47cf,
  title = {Soft X-ray multilayer beam splitters.},
  author = {T Haga and M C Tinone and M Shimada and T Ohkubo and A Ozawa},
  year = {1998},
  doi = {10.1107/s0909049597019389},
  url = {https://pubmed.ncbi.nlm.nih.gov/15263621/},
  note = {Source identifier: 15263621}
}