@misc{indiciae5b95b6b230d6,
  title = {Vacuum-ultraviolet beam array generation by flat micro-optical structures.},
  author = {R Grunwald and U Neumann and V Kebbel and H J Kühn and K Mann and U Leinhos and H Mischke and D Wulff-Molder},
  year = {2004},
  doi = {10.1364/ol.29.000977},
  url = {https://pubmed.ncbi.nlm.nih.gov/15143646/},
  note = {Source identifier: 15143646}
}