@misc{indiciae7ef8f8028558,
  title = {Surface analysis in microelectronics.},
  author = {S Pignataro},
  year = {1995},
  doi = {10.1007/s0021653530227},
  url = {https://pubmed.ncbi.nlm.nih.gov/15048472/},
  note = {Source identifier: 15048472}
}