@misc{indiciae0c7cd05a7223, title = {A scanning interference microscope arrangement.}, author = {T CASPERSSON and L CARLSON and G SVENSSON}, year = {1954}, doi = {10.1016/s0014-4827(54)80112-1}, url = {https://pubmed.ncbi.nlm.nih.gov/13220610/}, note = {Source identifier: 13220610} }