@misc{indiciaea8ec93f94016,
  title = {Phase-modulation scatterometry.},
  author = {Petre C Logofătu},
  year = {2002},
  doi = {10.1364/ao.41.007187},
  url = {https://pubmed.ncbi.nlm.nih.gov/12477107/},
  note = {Source identifier: 12477107}
}