@misc{indiciaeb9052473f470,
  title = {Depth profiles and resolution limits in accelerator-based solid state analysis.},
  author = {R Fischer},
  year = {2002},
  doi = {10.1007/s00216-002-1505-6},
  url = {https://pubmed.ncbi.nlm.nih.gov/12397480/},
  note = {Source identifier: 12397480}
}