TY  - RPRT
TI  - High-resolution imaging ellipsometer.
AU  - Qiwen Zhan
AU  - James R Leger
PY  - 2002
DO  - 10.1364/ao.41.004443
UR  - https://pubmed.ncbi.nlm.nih.gov/12153069/
ID  - 12153069
ER  -