@misc{indiciaeefb7a54f2c2d,
  title = {High-resolution imaging ellipsometer.},
  author = {Qiwen Zhan and James R Leger},
  year = {2002},
  doi = {10.1364/ao.41.004443},
  url = {https://pubmed.ncbi.nlm.nih.gov/12153069/},
  note = {Source identifier: 12153069}
}