Biomedical subjects

Tsutom Yotsuya

Publications and source records attributed to Tsutom Yotsuya.

3 recordsLinked to original sources

PubMed2004

Optimization of diffraction grating profiles in fabrication by electron-beam lithography.

We propose a new design method for periodic diffraction gratings to be fabricated with direct-writing electron-beam lithography. When the grating has a small period, the proximity effect of electron scattering restricts the grating profile after developing. Our design method optimizes the electron-dose profile and grating profile simultaneously to obtain the desired diffraction efficiency under the restriction of the proximity effect. The optimization is made with rigorous electromagnetic grating analysis and the resist development simulator. When we designed the diffraction grating with a period of 1.0 microm to obtain the highest efficiency of the first-order diffracted light of a 633-nm wavelength, the calculated grating profile was really different from the profile optimized only with rigorous electromagnetic grating analysis. Moreover, the diffraction grating of the electron-beam resist was fabricated according to the simulation result. The estimated diffraction efficiency was 82%, and the measured efficiency was 70%.

Journal Article↗

PubMed2003

Planar reflection grating lens for compact spectroscopic imaging system.

A compact spectroscopic imaging device consisting of a planar reflection grating lens, a probe fiber array, and a two-dimensional image sensor was proposed and discussed. Reflected or luminescent lights from a subject are coupled to the probe fibers, guided to fiber output ends, radiated into the air, diffracted by the grating lens with wavelength-dependent angle, and focused onto lines on the image sensor. Two-dimensional intensity distribution on the image sensor can give one-dimensional spectrum distribution along a specified direction. A grating lens was designed with a fiber array and a CCD image sensor for 100-nm wavelength range and 10-mm fiber array width. A spectral resolution of 5 nm and a spatial resolution of 0.25 mm were experimentally confirmed.

Journal Article↗

PubMed2002

Polarization-multiplexed diffractive optical elements fabricated by subwavelength structures.

Polarization-multiplexed phase-only diffractive optical elements with subwavelength structures are proposed and fabricated. The differences among the phase modulations result from the differences among the effective indices exhibited in the subwavelength structures with various filling factors and surface profiles, and the phase retardations are obtained by the relief depth of the structures. The polarization-selective property is achieved by the polarization dependence of the effective indices exhibited in the one-dimensional subwavelength structures and the polarization independence exhibited in the two-dimensional structures. Additionally, the polarization contrast of our polarization-multiplexed elements, defined as the cross talk between the two polarization incidences, is independent of the relief depth. The principle of the polarization multiplexing by use of the subwavelength structures is described, and the fabrication results for the polarization-multiplexed computer-generated holograms are demonstrated.

Journal Article↗