Vibration-compensated interferometry system using phase-modulating interference fringe subdivision technology.
An innovative vibration-compensation method, with phase-modulating interference fringe subdivision technology, is described. It simulates fringe movement by the phase difference of signals and can detect the fringe movement with an accuracy of 1/400 fringe spacing using this subdivision technology. A closed-loop vibration-compensation system is built, and the measurement of an interference fringe movement and a vibration-compensation test are successfully demonstrated. Because of this new method and a new feedback algorithm that was introduced, interference fringes can be stabilized at any preset phase position in real time. Compared with known methods, this method is simple and inexpensive, as well as effective.
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